Precise CD-SEM metrology of resist patterns at around 20 nm for 0.33NA EUV lithography
- Nobuhiro Okai
- Erin Lavigne
- et al.
- 2014
- SPIE Advanced Lithography 2014
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3520 results for Mathematical Sciences
ICE: Ionic contrast enhancement for organic solvent negative tone develop
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
Short-term forecasting of cloud images using local features
- Wenhui Jiang
- Fei Su
- et al.
- 2013
- ICGIP 2013
Dynamic and adaptive calling context encoding
- Jianjun Li
- Zhenjiang Wang
- et al.
- 2014
- CGO 2014
Optimizing R VM: Allocation removal and path length reduction via interpreter-level specialization
- Haichuan Wang
- Peng Wu
- et al.
- 2014
- CGO 2014
High-speed low-power short-reach optical interconnects for high-performance computing and servers
- Daniel M. Kuchta
- 2014
- SPIE OPTO 2014
Mid-infrared nonlinear silicon photonics
- Xiaoping Liu
- Bart Kuyken
- et al.
- 2014
- SPIE OPTO 2014
High-efficiency heterojunction solar cells on crystalline germanium substrates
- Bahman Hekmatshoar
- Davood Shahrjerdi
- et al.
- 2014
- SPIE OPTO 2014
Mid-IR heterogeneous silicon photonics
- Gunther Roelkens
- Utsav Dave
- et al.
- 2014
- SPIE OPTO 2014
Capillary-driven microfluidic chips with evaporation-induced flow control and dielectrophoretic microbead trapping
- Yuksel Temiz
- Jelena Skorucak
- et al.
- 2014
- SPIE Photonics West 2014