Publications

3541 results for Mathematical Sciences

A contact-reducing method over topography by combining the RELACS technique and bi-layer process
- - Chieh-Yu Lin
  - Karen Petrillo
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Stochastic language model for analyzing document physical layout
- - Tapas Kanungo
  - Song Mao
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
High numerical aperture-imaging implications for chemically amplified photoresists
- - Martha I. Sanchez
  - Frances A. Houle
  - et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Application of blends and side chain Si-O copolymers as high etch resistant sub 100 nm E-beam resists
- - Wu-Song Huang
  - Ranee Kwong
  - et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
An interactive parallel visualization framework for distributed data
- - Kenneth A. Perrine
  - Donald R. Jones
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
On finite-state information rates from channel simulations
- - Dieter Arnold
  - Hans-Andrea Loeliger
- 2002
- IEEE International Symposium on Information Theory - Proceedings
Evolution of a 193 nm bilayer resist for manufacturing
- - R.W. Kwong
  - M. Khojasteh
  - et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
A filter bank approach for modeling and forecasting seasonal patterns
- - Ta-Hsin Li
  - Melvin J. Hinich
- 2002
- Technometrics
Fabrication challenges for next generation devices: MEMS for RF wireless communications
- - David Seeger
  - Jennifer Lund
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Carbon nanotube scanning probe for surface profiling of DUV and 193 nm photoresist pattern
- - Cattien V. Nguyen
  - Ramsey M. D. Stevens
  - et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering