Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Scanning tunneling microscopy study of the adsorption and recombinative desorption of hydrogen from the Si(100)-2x 1 surface
- - John J. Boland
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Study particle emission in vacuum from film deposits
- - Joseph S. Logan
  - James J. McGill
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Atmospheric pressure chemical vapor deposition of Si and SiGe at low temperatures
- - T.O. Sedgwick
  - P. Agnello
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactivity of a fluorine passivated silicon surface
- - Ruud A. Haring
  - Michael Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dopant diffusion in silicides: Effect of diffusion paths
- - Carol Stanis
  - J.M. Cotte
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dry surface cleaning in integrated vacuum reactive ion etching processes
- - Andrie S. Yapsir
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Moisture-induced interfacial oxidation of chromium on polyimide
- - B.K. Furman
  - H.M. Clearfield
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Spin superlattice formation in ZnSe-based diluted magnetic semiconductor heterostructures
- - B.T. Jonker
  - W.C. Chou
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma particulate contamination control. II. Self-cleaning tool design
- - Gary S. Selwyn
  - Edward F. Patterson
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Preparation of low resistivity Cu-1 at. %Cr thin films by magnetron sputtering
- - C. Cabral
  - J.M.E. Harper
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films