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Karen Petrillo- Michael Tittnich
- John Hartley
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- 2006
- SPIE Advanced Lithography 2006
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- SPIE Advanced Lithography 2006
- 2005
- SPIE Advanced Lithography 2005
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- 2005
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- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- Wei He
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- 2003
- Photomask and Next-Generation Lithography Mask Technology 2003
- Qinghuang Lin
- Chuck Black
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- 2003
- Microlithography 2003
- Katherina Babich
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- 2003
- Microlithography 2003
- Arpan P. Mahorowala
- Dario L. Goldfarb
- et al.
- 2003
- Microlithography 2003
- Dirk Pfeiffer
- Arpan Mahorowala
- et al.
- 2003
- Microlithography 2003