Structural and Electrical Demonstration of SiGe Cladded Channel for PMOS Stacked Nanosheet Gate-All-Around Devices
- 2020
- VLSI Technology 2020
Publications
This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
20 results for Mary Breton
A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices
- 2019
- IEDM 2019
Vertical Travelling Scatterometry for Metrology on Fully Integrated Devices
- 2022
- SPIE Advanced Lithography 2022
Scatterometry based methodologies for characterization of MRAM technology
- 2022
- SPIE Advanced Lithography 2022
Highly Selective SiGe Dry Etch Process for the Enablement of Stacked Nanosheet Gate-All-Around Transistors
- 2021
- ECS Meeting 2021
Advanced EUV Resist Characterization using Scatterometry and Machine Learning
- 2021
- ASMC 2021
EUV single exposure via patterning at aggressive pitch
- 2021
- SPIE Advanced Lithography 2021
Nanosheet Metrology Opportunities for Technology Readiness
- 2021
- SPIE Advanced Lithography 2021
Development of SiGe Indentation Process Control to Enable Stacked Nanosheet FET Technology
- 2020
- ASMC 2020
Fundamental characterization of stochastic variation for improved single-expose EUV patterning at aggressive pitch
- 2020
- SPIE Advanced Lithography 2020