Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present the result of polar angle resolved x-ray photoemission spectroscopy on Al (111) /0 and cluster calculations of the 0 (Is) binding energy (BE) for various model situations. In the experimental data two O(ls) peaks are observed, separated by 1.3 eV. The angular behavior (depth-resolution) could indicate that the lower BE peak is associated with an O atom under the surface, and the higher BE peak with an O atom above the surface. Equally, it could indicate oxygen islands on the surface where the perimeter atoms have a higher 0 (Is) BE than the interior atoms. The cluster calculations show that the former interpretation cannot be correct, since an O ads below the surface has a higher calculated O(ls) BE than one above. Cluster calculations simulating oxygen islands are, however, consistent with the experimental data. © 1991, American Vacuum Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics