Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
In this paper, we analyze the dynamics of a system consisting of two torsionally coupled pendula with dissipation and with external forcing. In addition to several general results about the periodic solutions of the system, we prove that a family of homoclinic solutions exists in part of the parameter space, and give computational evidence that part of this family is the type considered by Shil'nikov. The existence of such orbits generates rich dynamics, which we describe qualitatively and illustrate with computed solutions.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
M. Tismenetsky
International Journal of Computer Mathematics
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications