Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The determination of the copolymer composition as a function of molecular weight by preparative gel permeation chromatography (GPC) for a poly(styrene‐co‐vinyl stearate) sample is described. These results were compared to data obtained on the same copolymer by the previously described rapid stop‐and‐go GPC/IR method of analysis of copolymer composition as a function of molecular weight and found to be in good agreement. Copyright © 1976 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
R.W. Gammon, E. Courtens, et al.
Physical Review B