Revanth Kodoru, Atanu Saha, et al.
arXiv
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
Revanth Kodoru, Atanu Saha, et al.
arXiv
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
M. Hargrove, S.W. Crowder, et al.
IEDM 1998