M. Hargrove, S.W. Crowder, et al.
IEDM 1998
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Revanth Kodoru, Atanu Saha, et al.
arXiv
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME