Sean D. Burns, David R. Medeiros, et al.
Proceedings of SPIE-The International Society for Optical Engineering
Sean D. Burns, David R. Medeiros, et al.
Proceedings of SPIE-The International Society for Optical Engineering
Dario L. Goldfarb, Libor Vyklicky, et al.
J. Photopolym. Sci. Tech.
Martin Glodde, Dario L. Goldfarb, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Katherina Babich, Arpan P. Mahorowala, et al.
Microlithography 2003