Publication
Metrologia
Paper

Surface roughness standards, obtained with the scanning tunneling microscope operated at atmospheric air pressure

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Abstract

Microstructure surface texture is studied with the Scanning Tunneling Microscope operated at atmospheric air pressure. A standardization procedure for surface microstructure is proposed. We introduce two parameters in order to characterize surface areas in the micrometer and submicrometre range, which we term "granular roughness" and "microroughness". Measurements of a class "0" standard block gauge give a granular roughness R a value of 0.02 μm.

Date

01 Feb 2005

Publication

Metrologia