Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
HRTEM and RT magnetometry were used to characterize Ta/Co/Ta sandwiches sputter-deposited on Si(001) wafers. The sandwiches show an intermixed Ta/Co interface region of about 10 Å thickness, which is connected to the presence of a non-ferromagnetic interfacial layer of 6.6 Å thickness per Ta/Co interface. The Co layer has a textured morphology, composed of columns with diameters of about 10-100 Å, and a marked 〈111〉 fee structure with numerous stacking faults. Repetitions of hep stacking sequences are mainly localized in the narrowest columns. The Ta layer shows a short-range ordering characterized by randomly oriented stacks of a few atomic planes about 10-20 Å large.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME