Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
ICRU publications form the legal and scientific backbone of medical physics. The ICRU publishes definitions, acceptable unit notations, procedures for measurement and applications, and physical data as directed by the International Commission in Radiological Protection (ICRP). Each of the ICRU publications are created using special ad-hoc commissions of international scientific experts. Some of these publications become the world-standard in not only medical physics, but for all physics, for example ICRU-37, `Stopping Powers for Electrons and Positrons' (1984), is still the most cited source for electron stopping powers. The newest ICRU publication on stopping powers (1994), ICRU-49, will be reviewed with emphasis on how the tables were derived and their accuracy.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T. Schneider, E. Stoll
Physical Review B
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.