Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Polarized neutron reflection was used to determine the magnetic structure of two different antiferromagnetically coupled multilayer systems, Fe/Gd and Fe/Cr. In Fe/Gd, the Fe and Gd moments are coupled antiparallel at the interface. At low temperatures a surface-induced magnetic phase transition was found. In Fe/Cr, annealing at temperatures of up to 425°C resulted in the degrading of antiferromagnetic coupling between Fe layers and in the formation of ferromagnetically coupled regions. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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INFOS 2005
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Journal of Physics and Chemistry of Solids
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