T.H.P. Chang, M.G.R. Thomson, et al.
Microelectronic Engineering
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10 -19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
T.H.P. Chang, M.G.R. Thomson, et al.
Microelectronic Engineering
C.C. Williams, H.K. Wickramasinghe
SPIE OE/LASE 1988
E. Kratschmer, H.S. Kim, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
C.C. Williams, J. Slinkman, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films