Y. Taur, Y. Mii, et al.
IBM J. Res. Dev
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10 -19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
Y. Taur, Y. Mii, et al.
IBM J. Res. Dev
C.C. Williams, H.K. Wickramasinghe
SPIE OE/LASE 1988
George A. Sai-Halasz, Matthew R. Wordeman, et al.
IEEE Electron Device Letters
David W. Abraham, C.C. Williams, et al.
Journal of Microscopy