Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A powerful technique is described for optimizing electromagnetic codes that involve the boundary element method and nonlinear eigenvalue problems. It is specifically adapted to an algorithm that handles propagation in periodic structures and replaces the standard determinant search and linear equation solution subroutines. Through mechanical speedup and improved numerical convergence, the run time for large cases is reduced by an order of magnitude. Details of technique, the electromagnetic algorithm, and numerical studies are presented. © 1995 by Academic Press, Inc.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A. Skumanich
SPIE OE/LASE 1992
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