Publication
Journal of Applied Physics
Paper

Reduced Cu-Cr mixing and reduced Pt-Cu interdiffusion by oxygen in Cu/Cr and Pt/Cu/Cr thin films

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Abstract

The effects of oxygen on the Cu-Cr mixing and Pt-Cu interdiffusion have been studied using Cu/Cr and Pt/Cu/Cr thin film structures. Both processes are reduced by oxygen, in agreement with the predicted effects of oxygen by the surface potential model. The Pt-Cu interactions provide another example of competing ambient effects dominated by the more electronegative species Pt.

Date

01 Dec 1982

Publication

Journal of Applied Physics

Authors

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