S.S. Lau, W.K. Chu, et al.
Thin Solid Films
We have studied the ambient effects on the low-temperature diffusion of Cr and Si in thin Pt films. The surface-potential model proposed earlier predicts that, contrary to the case in gold, oxygen should suppress the diffusion of Cr and Si in Pt. We have observed a reduced out-diffusion of Cr and a reduced rate of Pt2Si formation in the prseence of O2. The technological significance of this effect is also discussed.
S.S. Lau, W.K. Chu, et al.
Thin Solid Films
Q.Y. Ma, Chin-An Chang, et al.
Journal of Applied Physics
J.F. Ziegler, W.K. Chu
Journal of Applied Physics
Chin-An Chang
Applied Physics Letters