Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Paper
Quantitative model of the thickness dependence of breakdown in ultra-thin oxides
Abstract
Computer calculations of the formation of a percolation path across a thin oxide are used to model breakdown. Quantitative agreement with the measured interface state density at breakdown is obtained. The case of homogeneously distributed defects is compared to exponentially distributed defects near one interface.
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