E. Burstein
Ferroelectrics
Figure Presented 3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 nm lateral resolution. Highly efficient patterning is enabled by a self-amplified depolymerization mechanism. Pixel writing speeds on the order of microseconds are demonstrated. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
E. Burstein
Ferroelectrics
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
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SPIE Advanced Lithography 2007