Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Paper
Probe-based 3-D nanolithography using self-amplified depolymerization polymers
Abstract
Figure Presented 3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 nm lateral resolution. Highly efficient patterning is enabled by a self-amplified depolymerization mechanism. Pixel writing speeds on the order of microseconds are demonstrated. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Related
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures