Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Figure Presented 3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 nm lateral resolution. Highly efficient patterning is enabled by a self-amplified depolymerization mechanism. Pixel writing speeds on the order of microseconds are demonstrated. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering