The decrease of integrated circuit feature size and the increase of operating frequencies require 3-D electromagnetic methods, such as the partial element equivalent circuit (PEEC) method, for the analysis and design of high-speed circuits. Very large systems of equations are often produced by 3-D electromagnetic methods, and model order reduction (MOR) methods have proven to be very effective in combating such high complexity. During the circuit synthesis of large-scale digital or analog applications, it is important to predict the response of the circuit under study as a function of design parameters such as geometrical and substrate features. Traditional MOR techniques perform order reduction only with respect to frequency, and therefore the computation of a new electromagnetic model and the corresponding reduced model are needed each time a design parameter is modified, reducing the CPU efficiency. Parameterized model order reduction (PMOR) methods become necessary to reduce large systems of equations with respect to frequency and other design parameters of the circuit, such as geometrical layout or substrate characteristics. We propose a novel PMOR technique applicable to PEEC analysis which is based on a parameterization process of matrices generated by the PEEC method and the projection subspace generated by a passivity-preserving MOR method. The proposed PMOR technique guarantees overall stability and passivity of parameterized reduced order models over a user-defined range of design parameter values. Pertinent numerical examples validate the proposed PMOR approach. © 2011-2012 IEEE.