Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Performance of Zr/O/W Schottky emitters at reduced temperatures

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Experimental measurements of emission stability and energy distributions from a Schottky emitter have been conducted at a tip temperature range from 1330 to 1800 K. The changes of emission properties have been observed at reduced tip temperatures. Noise fluctuations of the probe current increase with decrease of the tip temperature at a constant extraction voltage. The work function of the Schottky emitter increases with decrease of tip temperature. The energy distribution measurements show that the energy width at a given temperature increases with increasing angular emission current density. The energy width also increases with decreasing tip temperature at a given angular emission current density. The results indicate that the energy broadening is mainly contributed by electron tunneling. A comparison of the measured energy width with the theoretical predictions is discussed. © 1997 American Vacuum Society.