R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Patterns of thin films of nanoporous poly(methylsilsesquioxane) (PMSSQ) were generated using a lithographic method coupled with reactive ion etching. Surface hydrophilicity of the nanoporous films was modulated using a simple UV/O3 treatment. A fluorescent dye, 6-carboxyfluorescein (6-FAM), was attached using a linker, bis(hydroxyethyl) aminopropyltriethoxysilane (HE-APTS), to the patterns. An approximately 10 × increase in the green light intensity in the porous regions relative to flat silicon wafer surface was observed, which suggests that the patterned nanoporous PMSSQ thin film has a potential as a high density substrate for tethering bioprobe molecules. © 2003 Elsevier B.V. All rights reserved.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications