Wolfram Steurer, Leo Gross, et al.
Review of Scientific Instruments
A resistless proximal probe-based lithography technique combining scanning probe microscopy and the shadow masking technique is described. In this method, structures are locally deposited through pinhole-like apertures situated in the proximity of a cantilever tip. By this way, complex and submicron-sized structures of various materials can be directly patterned, and with predefined excursions of the sample, direct fabrication of arbitrary structures on the surface is possible.
Wolfram Steurer, Leo Gross, et al.
Review of Scientific Instruments
Percy Zahl, Martin Bammerlin, et al.
Review of Scientific Instruments
Richard Berndt, James K. Gimzewski, et al.
Ultramicroscopy
Christian Joachim, James K. Gimzewski, et al.
Physical Review Letters