Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Guo-Jun Qi, Charu Aggarwal, et al.
IEEE TPAMI
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998