PublicationJESPaperOn the Nature of CVD Si-Rich SiO2 and Si3N4 FilmsJESView publicationAbstractNo abstract available.Home↳ PublicationsDate09 Dec 2019PublicationJESAuthorsE.A. IreneN.J. ChouD.W. DongE. TierneyIBM-affiliated at time of publicationTopicsPhysical SciencesShare
