On-Chip Integrated Quantum-Dot–Silicon-Nitride Microdisk Lasers

Abstract

The use of SiN membranes with locally embedded quantum-dot (QD) films within a CMOS-like process flow is a potent approach that allows for the combination of active QD/SiN resonators and passive SiN circuits on the same platform. Researchers this approach to demonstrate a first on-chip QD/SiN microdisk laser coupled to planar SiN waveguides. The microdisk consists of a SiN/QD/SiN sandwich that supports high-Q whispering gallery modes (WGMs) with a maximum of optical confinement in the central QD layer. Lasing is achieved for different disk diameters under picosecond optical pumping.