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Sensors and Actuators, A: Physical
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Novel miniature integrated optical goniometers

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Abstract

A new principle and arrangement for directly determining the angle of incidence of an optical beam on an object are proposed and demonstrated. The novelty of the approach lies in the realization of a 'smart object', which extracts a portion of the incident beam's power into an optical waveguide attached to the object's surface or embedded in its body for converting the angle of incidence into the position of a guided beam with finite lateral extent. This 'integrated optical light pointer' beam is accomplished by means of creating additional degrees of freedom on the target in two different ways. While a first type is based on introducing spatial variations of the waveguide thickness, a second type makes use of a chirp of the grating periodicity. The feasibility for practical applications has been experimentally demonstrated by a direct comparison with a commercial high-resolution encoder, resulting in an r.m.s. error of <30″. Measurements have been performed for chips fabricated based on replicated polycarbonate substrates and with no external optics, showing the great potential of this approach for realizing low-cost yet high-performance miniature goniometers.

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Sensors and Actuators, A: Physical

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