Wide bandwidth room-temperature THz imaging array based on antenna-coupled MOSFET bolometer
- Thomas Morf
- Bernhard Klein
- et al.
- 2014
- Sensors and Actuators, A: Physical
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21 results at Sensors and Actuators, A: Physical
A high precision SOI MEMS-CMOS ±4g piezoresistive accelerometer
- Anindya Lal Roy
- Hrishikesh Sarkar
- et al.
- 2014
- Sensors and Actuators, A: Physical
Nanopositioner actuator energy cost and performance
- Johan B. C. Engelen
- Mohammed G. Khatib
- et al.
- 2013
- Sensors and Actuators, A: Physical
Power enhancement of micro thermoelectric generators by microfluidic heat transfer packaging
- N.Z. Wojtas
- E. Schwyter
- et al.
- 2012
- Sensors and Actuators, A: Physical
Shock resistance of ferromagnetic micromechanical magnetometers
- Jeffrey K. Yee
- Henry H. Yang
- et al.
- 2003
- Sensors and Actuators, A: Physical
In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations
- A. Dietzel
- R. Berger
- et al.
- 2002
- Sensors and Actuators, A: Physical
VLSI-NEMS chip for parallel AFM data storage
- M. Despont
- J. Brugger
- et al.
- 2000
- Sensors and Actuators, A: Physical
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Despont
- et al.
- 1999
- Sensors and Actuators, A: Physical
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical