T.O. Sedgwick, V.P. Kesan, et al.
IEDM 1991
The application of Raman scattering (inelastic light scattering) spectroscopy to the measurement of gas temperature and its gradient in hot flowing gas systems is described, using experiments on a chemical vapor deposition system as an example. Apparatus is described and data are presented showing temperature gradients in the range 280 C to 950 C with RMS deviations of 14°C on a spatial scale of 100μm. Advantages of the system are its ability to make measurements in a small well defined volume and to do this totally without perturbation of the system. The principle disadvantage is a relatively low rate of data acquisition. © 1975.
T.O. Sedgwick, V.P. Kesan, et al.
IEDM 1991
R. Kalish, T.O. Sedgwick, et al.
Applied Physics Letters
A. Zaslavsky, T.P. Smith III, et al.
Physical Review B
J.E. Smith Jr., M.H. Brodsky, et al.
Physical Review Letters