Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jul 1987

Interaction of Ti with fused silica and sapphire during metallization

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Abstract

No abstract available.

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Date

01 Jul 1987

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • Y.S. Chaug
  • N.J. Chou
  • Y.H. Kim
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

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