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Publication
Journal of Physics E: Scientific Instruments
Paper
Improved energy analyser for the scanning electron microscope
Abstract
An energy analyser is described for measuring the energy of the secondary electrons in the scanning electron microscope. It consists of a 63°deflection cylindrical analyser followed by an electron collimator. This is simpler than a mirror design reported previously and gives a higher transmission factor and less defocusing of the electron beam of the microscope. This analyser has been applied to measure point-to-point variations in surface potential with an accuracy to ±1 V.