Conference paper
Contacts in advanced CMOS: History and emerging challenges
Christian Lavoie, Praneet Adusumilli, et al.
ECS Meeting 2017 - New Orleans
In our study, we evaluate effective silicon and germanium oxide reduction by two surface treatments to achieve low contact resistivity at the semiconductor/metal interface. These chemistries, one alkaline and the other an acidic fluorine-based treatment, were utilized on epitaxial n-type Si
Christian Lavoie, Praneet Adusumilli, et al.
ECS Meeting 2017 - New Orleans
C. K. Hu, James Kelly, et al.
IITC 2017
Kangguo Cheng, A. Khakifirooz, et al.
VLSI Technology 2011
Praneet Adusumilli, A. Carr, et al.
IITC/AMC 2016