Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Scanning tunneling microscopy is a powerful tool for the study of surface structure. Information can be obtained by examining real-space structure within unit cells and by determining the registration of features relative to the positions of the bulk lattice. Techniques for image enhancement, distortion correction, and registration determination are described and illustrated for structural studies of the (V3xV3 l)R 30° Ag/Si(111) surface. © 1988, American Vacuum Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ellen J. Yoffa, David Adler
Physical Review B
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Ming L. Yu
Physical Review B