CLEO_SI 2020
Conference paper

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

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We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid χ(2)-χ(3) microresonators with Q ∼ 106, as well as integrated travelling wave EO modulators.