Hybrid Si₃N₄-LiNbO₃ integrated platform for electro-optic conversion

Abstract

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid χ(2)-χ(3) microresonators with Q ∼ 106, as well as integrated travelling wave EO modulators.