Growth of silicon oxide in thin film block copolymer scaffolds

Abstract

Thin films of asymmetric diblock copolymers have been used as scaffolds to define an ordered array of nanometer-scale reaction vessels in which High density arrays of silicon oxide nanostructures (see Figure) are produced by exposure to silicon tetrachloride. Such site-specific silicon oxide nanostructures could have widespread uses for sensory and optoelectronic applications.