Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Corrosion and oxidation of copper films were evaluated with respect to various pretreatments with inhibitor base using electrochemical trials, accelerated corrosion and thermal oxidation tests. Surface characterization required using ellipsometry. Auger spectrometry and mass spectrometry 5CH3BZT, 5Cl-5ZT and 1H-BZγ form, on the copper surface, protective films that may be considered equivalent on the following plans: kinetics of growth, heat stability, polymerization and wettability.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011