Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Epitaxial growth of Dy2 O3 films on SrTiO3 (001) substrates by molecular beam epitaxy

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Epitaxial Dy2 O3 thin films are grown on SrTiO 3 (001) substrates by molecular beam epitaxy. Structural, morphological, and interfacial properties of the Dy2 O3 film are investigated by in situ reflection high-energy electron diffraction (RHEED), ex situ x-ray diffraction (XRD), atomic force microscopy, and cross-sectional transmission electron microscopy (TEM). RHEED patterns and XRD spectra show that the Dy2 O3 film is grown epitaxially in a cubic phase with a (001) orientation. The surface of the film is smooth with a rms roughness of 4 Å. The TEM image shows that the Dy2 O 3 film is crystalline with an abrupt interface between the film and substrate without any indication of a chemical reaction or interdiffusion occurring at the interface. © 2011 American Vacuum Society.