MEMS 2000
Conference paper

Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging


This paper presents a new scanning probe concept based on an integrated dual-cantilever device, which has been designed to reduce the tip-wear problem. It consists of two cantilevers, one having a robust blunt tip, the other having a sharp tip. By means of integrated bimorph actuators, such a cantilever can be used to switch between coarse and fast imaging with the blunt tip, and high-resolution imaging with the sharp tip. Hence the delicate sharp tip is used only when high resolution is required, which greatly increases the probe's lifetime. A high-sensitivity, constricted piezoresistive strain sensor is used for high-resolution imaging. Imaging with the dual-cantilever probe has been demonstrated successfully.