Compact copper/epoxy-based electromagnetic scanner for scanning probe applications

Abstract

We report on the fabrication of a flat X/Y/Z microscanner that uses flexible rubber posts as a spring system and planar coils embedded in an epoxy body for electromagnetic actuation. The device is primarily intended for motion in the X-Y plane, in which it can scan a 100 μm displacement range with about 3 mW of power. Various shapes of the posts are considered in order to adjust the ratios of stiffnesses for inplane and out-of-plane motion.