PaperEffects of reactive ion etching on chemical vapor depositionC.Y. Wong, P.E. BatsonApplied Physics Letters
PaperAs segregation to grain boundaries in SiC.R.M. Grovenor, P.E. Batson, et al.Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Conference paperMaterials and process integration issues in metal gate/high-k stacks and their dependence on device performanceA.C. Callegari, K. Babich, et al.ECS Meeting 2007
PaperHigh resolution spectrometer coupling to the sub-Å IBM STEMP.E. BatsonMicroscopy and Microanalysis
