Developments in 2D AFM metrology

Abstract

In a previous paper1, a 2D atomic force probe metrology systemwas described. The system consists of a 2D atomic force probe used inattractive mode (non-contact) with a laser inter-ferometer system formeasuring sample displacement with nanometer sensitivity. The forceprobe consists of a square cantilever and specially designed 2D tip.The tip and cantilever are vibrated in 2D and the shift in resonanceas the surface approaches is used for surface sensing. The system isable to measure submicrometer lines and trenches with accuracy andprecision at the nanometer level. This paper will discuss operationalcharacteristics of the system and the application of 2D AFM metrologyto calibration of optical and scanning electron microscope systems.