About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Conference paper
Developments in 2D AFM metrology
Abstract
In a previous paper1, a 2D atomic force probe metrology systemwas described. The system consists of a 2D atomic force probe used inattractive mode (non-contact) with a laser inter-ferometer system formeasuring sample displacement with nanometer sensitivity. The forceprobe consists of a square cantilever and specially designed 2D tip.The tip and cantilever are vibrated in 2D and the shift in resonanceas the surface approaches is used for surface sensing. The system isable to measure submicrometer lines and trenches with accuracy andprecision at the nanometer level. This paper will discuss operationalcharacteristics of the system and the application of 2D AFM metrologyto calibration of optical and scanning electron microscope systems.
Related
Conference paper
Unassisted true analog neural network training chip
Conference paper