Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
This paper is concerned with the study of a general class of functional equations covering as special cases the relation which defines the up-function as well as equations which arise in multiresolution analysis for wavelet construction. We discuss various basic properties of solutions to these functional equations such as regularity, polynomial containment within the space spanned by their integer shifts and their computability by subdivision algorithms. © 1993 J.C. Baltzer AG, Science Publishers.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
T. Graham, A. Afzali, et al.
Microlithography 2000
Shu Tezuka
WSC 1991
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ