Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Complex formation and growth at the Cr and Cu-polyimide interface

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In this paper we describe a detailed experimental and theoretical investigation of the initial stages of formation of the metal/polyimide interface. Core and valence level spectroscopies combined with ab initio quantum-chemical calculations have permitted a unique interpretation of the interface growth in terms of charge transfer complex formation between the deposited metal atom and the underlying polymer. The detailed evidence as well as implications concerning metal layer adhesion will be discussed. © 1988, American Vacuum Society. All rights reserved.