Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Chemisorption of a CO molecule on regular and defect sites of the MgO(100) surface has been investigated by means of cluster model calculations. At all sites studied, CO bonds at the cation with the C atom closest to the surface. The bonding is considerably larger at a three-coordinated corner site than for a regular five-coordinated surface site. A blueshift in the C-O stretching frequency, ωe, of adsorbed CO compared to free CO is found; the shift is much higher for a corner than for a surface site because of the larger local electric field for low-coordinated cations. Both the bond strength and the ω shift are largely due to electrostatic effects and not to the formation of a dative σ-bond with the surface. Surface relaxation effects have also been considered. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Ronald Troutman
Synthetic Metals
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989