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IBM J. Res. Dev
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Chemical amplification resists: History and development within IBM

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Abstract

The chemical amplification concept was invented in IBM Research an quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design and advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies. The history and development of this concept are discussed.

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IBM J. Res. Dev

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