Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The chemical amplification concept was invented in IBM Research an quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design and advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies. The history and development of this concept are discussed.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)
Nanda Kambhatla
ACL 2004
Arun Viswanathan, Nancy Feldman, et al.
IEEE Communications Magazine