Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A systematic investigation with ballistic-electron emission microscopy (BEEM) of local Schottky-barrier heights for ≅ 100 Å thick films of Au, Ag, Cu, Mg and Ni evaporated onto cleaved n-GaP(110) surfaces is presented. It is shown that the onset of the BEEM current follows a 5 2 power law, thermally broadened by the tip Fermi function. Schottky-barrier heights are found to be 1.41 ± 0.02 eV (Au), 1.27 ± 0.02 eV (Ag), 1.21 ± 0.03 eV (Cu), 1.03 ± 0.02 eV (Mg) and 1.06 ± 0.06 eV (Ni). In addition, the influence of varying injection geometry and tip contamination on the BEEM spectra is discussed. © 1991.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Imran Nasim, Melanie Weber
SCML 2024
A. Reisman, M. Berkenblit, et al.
JES
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures