William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
T.N. Morgan
Semiconductor Science and Technology
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
R.W. Gammon, E. Courtens, et al.
Physical Review B