Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Revanth Kodoru, Atanu Saha, et al.
arXiv
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
A. Reisman, M. Berkenblit, et al.
JES