Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
We report detection of forces as small as 1.4 × 10-18 N in a 1 Hz bandwidth using ultrathin silicon cantilevers operating at liquid helium temperatures. Cantilever fabrication, the importance of surface cleanliness and various measurement issues are discussed. Tip-surface interactions are described, including the detection of single electron trapping-untrapping events. Applications of attonewton force detection for single spin magnetic resonance force microscopy (MRFM) and ultrasensitive magnetometry are discussed. © Springer-Verlag 2001.
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Frank Stem
C R C Critical Reviews in Solid State Sciences
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering