Adventures in attonewton force detectionD. RugarB.C. Stipeet al.2001Applied Physics A: Materials Science and Processing
Quality factors in micron- and submicron-thick cantileversKevin Y. YasumuraTimothy D. Stoweet al.2000JMEMS
Attonewton force detection using ultrathin silicon cantileversT.D. StoweK.Y. Yasumuraet al.1997Applied Physics Letters